High Precision Deposition

Deposition Technologies

Reference Samples

Teaching Tool

High precision large area Pulsed Laser Deposition (PLD) and magnetron sputter deposition techniques are installed to deposit nanometer single and multilayers showing X-ray optical quality.
Across a stack of more than 500 layers with single layer thicknesses in the range between 1 to 10 nm a variation of single layer thickness considerably lower than σD = 0.1 nm and an interface roughness below σR = 0.25 nm is realized. Thickness homogeneity Δd/d <1% and lateral thickness gradients Δd/Δx in the range of 10-8 are guaranteed across macroscopic substrate dimensions.
The deposition can be carried out on rectangular substrates and on substrates up to 8 inch diameter (LA-PLD).
These high precision layers are applied as mirrors for total reflection, for high precision reference samples and as samples for teaching, testing and demonstration of the performance of X-ray instrumentation.